subfab

English

Etymology

sub- +‎ fab

Noun

subfab (plural subfabs)

1. The area underneath a semiconductor fabrication plant
   • 2015 September 6, Rachael M. Jones et al., “Exposure Reconstruction and Risk Analysis for Six Semiconductor Workers With Lymphohematopoietic Cancers”, in Journal of Occupational and Environmental Medicine‎^[1], volume 57, →DOI:

     Line A involved a 121,000 ft 2 area, with downdraft laminar flow and flow-through ventilation from fab to subfab areas; the facility uses an open bay and chase design, such that SEGs may overlap within process bays or maintenance chases.